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mks真空計627B01TBC1B半導體CVD濺射鍍膜電源深圳市天鉉真空技術有限公司供應美國真空計流量計真空泵分子泵激光器
INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型標準真空計采用當今市場上的數字皮拉尼技術。 不銹鋼傳感器單元堅固耐用，結構設計緊湊，適用于半導體系統(tǒng)和標準應用，例如前級真空管。
益處
- 輕松一鍵調節(jié) ATM 和 HV
- 節(jié)省空間的堅固設計
- 鋁質殼體
- 可在任意方向安裝
- 不銹鋼測量單元，帶金屬密封饋入裝置
- 便于集成的對數信號輸出
- 螺紋接頭，具有 10 巴過壓能力
- 250 °C 烘烤型
- 在腐蝕應用中可選購鎳絲
- 陶瓷饋入裝置，適用于腐蝕性的應用 (PSG510 & PSG512)
- 可選設定點
- RoHS 合規(guī)
- 高真空電離真空計控制
- 前級真空壓力監(jiān)控
- 真空系統(tǒng)中的安全電路
- 高真空和低真空范圍內的一般真空測量和控制
類型
| PSG500 tungsten | PSG500-S tungsten, setpoints | PSG502-S nickel, setpoints | PSG510-S tungsten, setpoints, ceramic feedthroughs | PSG512-S nickel, setpoints, ceramic feedthroughs | ||
| 測量原則 | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | |
| 精度 (N2) | ||||||
| 1 x 10-3… 100 毫巴 | % of reading | ±15% | ±15% | ±15% | ±15% | ±15% |
| 5 x 10-4… 1 x 10-3 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
| 100 … 1000 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
| 可重復性（空氣） | ||||||
| 1 x 10-3… 100 毫巴 | % of reading | 2% | 2% | 2% | 2% | 2% |
| 輸出信號（測量信號） | ||||||
| 電壓范圍 | V | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 |
| 測量范圍 | V | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 |
| 測量范圍（空氣、O2、CO、N2） | mbar | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 |
| 設定點 | ||||||
| 設定點數量 | 2 | 2 | 2 | 2 | ||
| 設置范圍 | mbar | ? | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 |
| 滯后 | % of reading | ? | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold |
| 繼電器觸點 | V (dc) A (dc) | ? | 30 | 30 | 30 | 30 |
| 繼電器觸點： 轉換時間 | ms | ? | <20 | <20 | <20 | <20 |
| 電源電壓 | ||||||
| 真空計上 | V (dc) | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 |
| 波紋 | V (p-p) | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| 電壓與壓強 | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | |
| 內部容積 | ||||||
| DN 16 ISO-KF，DN 16 CF-R，7/16-20 UNF | cm3 (in.3) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) |
| DN 16 ISO-KF & DN 16 CF-R 長管 | cm3 (in.3) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) |
| 1/8'' NPT，4 VCR，8 VCR，1/2'' 管 | cm3 (in.3) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) |
| 容許溫度 | ||||||
| 運行 | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
| 真空連接 (1) | °C | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) |
| 貯存 | °C | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 |
| 重量 | ||||||
| DN 16 ISO-KF，7/16-20 UNF | g | 80 | 80 | 80 | 80 | 80 |
| DN 16 CF-R，4 VCR | g | 100 | 100 | 100 | 100 | 100 |
| 1/8'' NPT，1/2'' 管 | g | 70 | 70 | 70 | 70 | 70 |
| 8 VCR，DN 16 ISO-KF 長管 | g | 130 | 130 | 130 | 130 | 130 |
| DN 16 CF-R 長管 | g | 140 | 140 | 140 | 140 | 140 |
| 錯誤信號 | V | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) |
| 輸出電阻 | ? | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 |
| *小負載電阻 | k? | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof |
| 反應時間 | ms | 80 | 80 | 80 | 80 | 80 |
| 真空計識別 | k? | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common |
| 調整 | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | |
| 電流消耗 | mA | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) |
| 功耗 | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| 電氣連接 | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | |
| 傳感器電纜 | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | |
| 電纜長度 | m | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) |
| 暴露于真空的材料 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | |
| 單絲 | W | W | Ni | W | Ni | |
| 容許壓力 | bar (absolute) | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases |
| 安裝定位 | any | any | any | any | any | |
| 保護等級 | IP40 | IP40 | IP40 | IP40 | IP40 | |
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